Concepedia

M.-C.M. Lee

ML

2

Publications

226

Citations

2

H-Index

2005

Active since

Affiliations

University of California, Berkeley(Current)

M.-C.M. Lee is an author at University of California, Berkeley specializing in microfabrication, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMicrofabricationPhotonicsNanophotonicsOptomechanicsNanoelectronicsOptical SensorsOptoelectronicsSurface Science

Publications per year

2005–2006

2

Publications

2

Thermal Annealing in Hydrogen for 3-D Profile Transformation on Silicon-on-Insulator and Sidewall Roughness Reduction

M.-C.M. Lee, Ming C. Wu · Journal of Microelectromechanical Systems · 2006 · 197 citations

Electrical Engineering, Wafer Scale Processing, Engineering +14

MEMS-actuated photonic crystal switches

M.-C.M. Lee, Dooyoung Hah, Erwin K. Lau et al. · IEEE Photonics Technology Letters · 2005 · 29 citations

Optical Materials, Engineering, One-dimensional Photonic Crystals +18

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