Xinming Lü

Retardation of boron diffusion in silicon by defect engineering

Lin Shao, Xinming Lü, Xuemei Wang et al. · Applied Physics Letters · 2001 · 44 citations

Semiconductors, Semiconductor Technology, Boron Diffusion +12

Cross-sections of B(p,α)8Be reaction for boron analysis

Jiarui Liu, Xinming Lü, Xuemei Wang et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2002 · 31 citations

Boron Analysis, Nuclear Physics, Physics +4

High-energy recoil implantation of boron into silicon

Lin Shao, Xinming Lü, Jianyue Jin et al. · Applied Physics Letters · 2000 · 23 citations

Energetic Si Ions, Electrical Engineering, Shallow Junctions +10

Cluster-ion implantation: An approach to fabricate ultrashallow junctions in silicon

Xinming Lü, Lin Shao, Xuemei Wang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 23 citations

Materials Science, Semiconductors, Geb Cluster Ions +15

Non-linear effect on radiation damage of silicon by cluster ion bombardment

Jiarui Liu, Xuemei Wang, Lin Shao et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2002 · 14 citations

Ion Implantation, Engineering, Physics +10