Concepedia

Y. Tzeng

YT

Statistics

Publications

2

Citations

23

H-Index

2

Active since

2010

Affiliations

Taiwan Semiconductor Manufacturing Company (China)(Current)

Kyoto Institute of Technology

Y. Tzeng is an author at Taiwan Semiconductor Manufacturing Company (China) specializing in materials science, physics, and applied physics.

Top concepts

Publications per year

2010–2011

2

Publications

2

Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si<sub>1–<i>x</i></sub>Ge<i><sub>x</sub></i> layers on Si(100) by multiwavelength micro-Raman spectroscopy

Y. Tzeng, Scott Ku, Stock Chang et al. · Journal of materials research/Pratt's guide to venture capital sources · 2011 · 12 citations

, , +7

Noncontact In-Line Monitoring of Ge Content and Thickness Variations of Epitaxial Si<sub>1-<i>x</i></sub>Ge<sub><i>x</i></sub>Layers on Si(100) Using Polychromator-Based Multiwavelength Micro-Raman Spectroscopy

Y. Tzeng, Scott Ku, Stock Chang et al. · Applied Physics Express · 2010 · 11 citations

, , +17

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