Concepedia

Scott Ku

SK

Statistics

Publications

4

Citations

45

H-Index

4

Active since

1980

Affiliations

Taiwan Semiconductor Manufacturing Company (China)(Current)

Kyoto Institute of Technology

Scott Ku is an author at Taiwan Semiconductor Manufacturing Company (China) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsPhysicsSurface ScienceSpectroscopyMicrofluidicsSemiconductorsMultiphase Flow

Publications per year

1980–2012

4

Publications

4

Physical Cleaning Enhancement Using Advanced Spray with Uniform Droplet Control

Ying Hsueh Chang Chien, Matt Yeh, Scott Ku et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2012 · 12 citations

Engineering, Uniform Droplet Control, Liquid-liquid Flow +16

Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si<sub>1–<i>x</i></sub>Ge<i><sub>x</sub></i> layers on Si(100) by multiwavelength micro-Raman spectroscopy

Y. Tzeng, Scott Ku, Stock Chang et al. · Journal of materials research/Pratt's guide to venture capital sources · 2011 · 12 citations

Semiconductors, Materials Science, Epitaxial Growth +7

Noncontact In-Line Monitoring of Ge Content and Thickness Variations of Epitaxial Si<sub>1-<i>x</i></sub>Ge<sub><i>x</i></sub>Layers on Si(100) Using Polychromator-Based Multiwavelength Micro-Raman Spectroscopy

Y. Tzeng, Scott Ku, Stock Chang et al. · Applied Physics Express · 2010 · 11 citations

Engineering, Vacuum Device, Silicon On Insulator +17

Low-energy antimony implantation in silicon

W. K. Chu, M. J. Sullivan, Scott Ku et al. · Radiation Effects · 1980 · 10 citations

Materials Engineering, Materials Science, Electrical Engineering +10

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