Statistics
Publications
2
Citations
22
H-Index
2
Active since
1993
Affiliations
T. Chisholm is an author at Danaher (United Kingdom) specializing in electron beam physics, semiconductor devices, and electrical engineering.
Publications per year
1993–1994
2
2
100 kV electron beam lithography using a Schottky field emission source
Bert Koek, T. Chisholm, J. Somers et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 11 citations
Engineering, Electrical Engineering, Electronic Materials +12
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