Statistics
Publications
1
Citations
21
H-Index
1
Active since
1992
Affiliations
University of Arizona(Current)
Scott E. Beck is an author at University of Arizona specializing in semiconductor devices, materials science, and plasma exposure testing.
Publications per year
1992–1992
1
1
Particle contamination on a silicon substrate in a SF6/Ar plasma
Mithkal M. Smadi, George Kong, Robert N. Carlile et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +16
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