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HisatakaHayashi Sekine

HS

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Publications

1

Citations

27

H-Index

1

Active since

1999

Affiliations

Ulvac (Japan)(Current)

HisatakaHayashi Sekine is an author at Ulvac (Japan) specializing in applied physics, chemical kinetics, and nanoelectronics.

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Publications per year

1999–1999

1

Publications

1

Realistic Etch Yield of Fluorocarbon Ions in SiO<sub>2</sub> Etch Process

Yukinobu Hikosaka, HisatakaHayashi Sekine, H. Endo et al. · Japanese Journal of Applied Physics · 1999 · 27 citations

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