Chang-Auck Choi

A low-loss single-pole six-throw switch based on compact RF MEMS switches

J. Lee, Chang Han Je, Sungweon Kang et al. · IEEE Transactions on Microwave Theory and Techniques · 2005 · 54 citations

Low-power Electronics, Electrical Engineering, Sp6t Mems +11

A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror

Dooyoung Hah, Chang-Auck Choi, Chang‐Kyu Kim et al. · Journal of Micromechanics and Microengineering · 2004 · 42 citations

Fixed Fingers, Wafer Scale Processing, Engineering +15

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Dooyoung Hah, Chang-Auck Choi, Chi‐Hoon Jun et al. · 2004 · 17 citations

Engineering, Micromachines, Microfabrication +12

Surface properties of ZrO₂thin film under Cl₂/Ar plasma using angle-resolved X-ray photoelectron spectroscopy

Jong‐Chang Woo, Chang-Auck Choi, Wooseok Yang et al. · Japanese Journal of Applied Physics · 2014 · 14 citations

Engineering, Plasma Processing, Chemical Engineering +17

Micromachined air-gap structure MEMS acoustic sensor using reproducible high-speed lateral etching and CMP process

Sang Choon Ko, Chi‐Hoon Jun, Won Ick Jang et al. · Journal of Micromechanics and Microengineering · 2006 · 13 citations

Aeroacoustics, Mems Devices, Engineering +19