Concepedia

Author

Shaista Babar

University of Illinois Urbana-Champaign

Also Known As

Shaista Babar

9

Publications

709

Citations

7

H-Index

32

Concepts

All Affiliations

University of Illinois Urbana-Champaign
SB

About

Shaista Babar is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

692

2

Applied Physics

5

5

680

3

Chemistry

5

5

107

4

Chemical Engineering

3

3

74

5

Natural Sciences

2

2

601

Shaista Babar

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6

Publications

692

Citations

6

H-Index

YearCitations

Optical constants of Cu, Ag, and Au revisited

Shaista Babar, J. H. Weaver

Applied Optics

2015

585

Thermal Atomic Layer Etching of Copper by Sequential Steps Involving Oxidation and Exposure to Hexafluoroacetylacetone

Elham Mohimi, Xiaoqing I. Chu, Brian B. Trinh,

ECS Journal of Solid State Science and Technology

2018

46

W:Al<sub>2</sub>O<sub>3</sub> Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

Shaista Babar, Anil U. Mane, Ángel Yanguas-Gil,

The Journal of Physical Chemistry C

2016

17

Role of nucleation layer morphology in determining the statistical roughness of CVD-grown thin films

Shaista Babar, Tian T. Li, John R. Abelson

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2014

16

Surface-Selective Chemical Vapor Deposition of Copper Films through the Use of a Molecular Inhibitor

Shaista Babar, Elham Mohimi, Brian B. Trinh,

ECS Journal of Solid State Science and Technology

2015

16

Chemical Vapor Deposition of Copper: Use of a Molecular Inhibitor to Afford Uniform Nanoislands or Smooth Films

Shaista Babar, Luke M. Davis, Pengyi Zhang,

ECS Journal of Solid State Science and Technology

2014

12

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