Concepedia

Shaista Babar

SB

6

Publications

692

Citations

6

H-Index

2014

Active since

Affiliations

University of Illinois Urbana-Champaign(Current)

Shaista Babar is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringChemistryApplied PhysicsSurface ScienceMaterial ScienceThin FilmsNanotechnologyChemical EngineeringPhysicsNanomaterials

Publications per year

2014–2018

6

Publications

6

Optical constants of Cu, Ag, and Au revisited

Shaista Babar, J. H. Weaver · Applied Optics · 2015 · 585 citations

Optical Materials, Engineering, Optical Testing +17

Thermal Atomic Layer Etching of Copper by Sequential Steps Involving Oxidation and Exposure to Hexafluoroacetylacetone

Elham Mohimi, Xiaoqing I. Chu, Brian B. Trinh et al. · ECS Journal of Solid State Science and Technology · 2018 · 46 citations

Engineering, Oxidation Resistance, Atomic Layer Etching +19

W:Al<sub>2</sub>O<sub>3</sub> Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

Shaista Babar, Anil U. Mane, Ángel Yanguas-Gil et al. · The Journal of Physical Chemistry C · 2016 · 17 citations · Full text

Optical Materials, Engineering, Metallic Nanomaterials +22

Role of nucleation layer morphology in determining the statistical roughness of CVD-grown thin films

Shaista Babar, Tian T. Li, John R. Abelson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 16 citations

Engineering, Chemistry, Nucleation Stage +18

Surface-Selective Chemical Vapor Deposition of Copper Films through the Use of a Molecular Inhibitor

Shaista Babar, Elham Mohimi, Brian B. Trinh et al. · ECS Journal of Solid State Science and Technology · 2015 · 16 citations

Engineering, Vtms Pressures, Thin Film Process Technology +18

Rows per page

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