Elham Mohimi

Thermal Atomic Layer Etching of Copper by Sequential Steps Involving Oxidation and Exposure to Hexafluoroacetylacetone

Elham Mohimi, Xiaoqing I. Chu, Brian B. Trinh et al. · ECS Journal of Solid State Science and Technology · 2018 · 46 citations

Engineering, Oxidation Resistance, Atomic Layer Etching +19

Area selective CVD of metallic films from molybdenum, iron, and ruthenium carbonyl precursors: Use of ammonia to inhibit nucleation on oxide surfaces

Elham Mohimi, Zhejun V. Zhang, Sumeng Liu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 37 citations

Engineering, Chemistry, Chemical Deposition +20

W:Al₂O₃ Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

Shaista Babar, Anil U. Mane, Ángel Yanguas-Gil et al. · The Journal of Physical Chemistry C · 2016 · 17 citations · Full text

Optical Materials, Engineering, Metallic Nanomaterials +22

Low temperature chemical vapor deposition of superconducting vanadium nitride thin films

Elham Mohimi, Zhejun V. Zhang, Justin Mallek et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 17 citations

Materials Science, Superconducting Material, Mtorr Ammonia +14

Surface-Selective Chemical Vapor Deposition of Copper Films through the Use of a Molecular Inhibitor

Shaista Babar, Elham Mohimi, Brian B. Trinh et al. · ECS Journal of Solid State Science and Technology · 2015 · 16 citations

Engineering, Vtms Pressures, Thin Film Process Technology +18