Elham Mohimi - Concepedia

Author

Elham Mohimi

University of Illinois Urbana-Champaign

Also Known As

E. Mohimi, Elham Mohimi

Publications

186

Citations

H-Index

Concepts

All Affiliations

University of Illinois Urbana-Champaign MIT Lincoln Laboratory

About

Elham Mohimi is an author at University of Illinois Urbana-Champaign specializing in chemistry, materials science, and engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	8	8	173
2	Applied Physics	5	5	109
3	Chemical Engineering	4	4	111
4	Natural Sciences	1	1	15
5	Biochemistry	1	1	15

Elham Mohimi

Publications

173

Citations

H-Index

Page 1

	Year	Citations
Thermal Atomic Layer Etching of Copper by Sequential Steps Involving Oxidation and Exposure to Hexafluoroacetylacetone Elham Mohimi, Xiaoqing I. Chu, Brian B. Trinh, ECS Journal of Solid State Science and Technology EngineeringOxidation ResistanceAtomic Layer EtchingChemistryChemical Engineering	2018	46
Area selective CVD of metallic films from molybdenum, iron, and ruthenium carbonyl precursors: Use of ammonia to inhibit nucleation on oxide surfaces Elham Mohimi, Zhejun V. Zhang, Sumeng Liu, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringChemistryChemical DepositionChemical EngineeringRu Thin Films	2018	37
W:Al<sub>2</sub>O<sub>3</sub> Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition Shaista Babar, Anil U. Mane, Ángel Yanguas-Gil, The Journal of Physical Chemistry C Optical MaterialsEngineeringMetallic NanomaterialsChemistryChemical Deposition	2016	17
Low temperature chemical vapor deposition of superconducting vanadium nitride thin films Elham Mohimi, Zhejun V. Zhang, Justin Mallek, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceSuperconducting MaterialMtorr AmmoniaEngineeringHigh-tc Superconductivity	2019	17
Surface-Selective Chemical Vapor Deposition of Copper Films through the Use of a Molecular Inhibitor Shaista Babar, Elham Mohimi, Brian B. Trinh, ECS Journal of Solid State Science and Technology EngineeringVtms PressuresThin Film Process TechnologyChemistryChemical Deposition	2015	16
Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth Pengyi Zhang, Elham Mohimi, Tushar K. Talukdar, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringIron MetabolismChemistryChemical DepositionGrowth Rate	2016	15
Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films Elham Mohimi, Kinsey L. Canova, Zhejun Zhang, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceSuperconducting MaterialNh3 PressureHigh Temperature MaterialsMolybdenum Carbonitride	2019	13
Chemical Vapor Deposition of Copper: Use of a Molecular Inhibitor to Afford Uniform Nanoislands or Smooth Films Shaista Babar, Luke M. Davis, Pengyi Zhang, ECS Journal of Solid State Science and Technology Materials ScienceBare Substrate SurfaceChemical EngineeringSurface NanoengineeringEngineering	2014	12

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