T.B. Borzenko

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Active since

2003

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

T.B. Borzenko is an author at Institute of Microelectronics Technology and High Purity Materials specializing in surface science, materials engineering, and materials science.

Publications per year

2003–2003

Publications

Fabrication of sub-10-nm Au–Pd structures using 30 keV electron beam lithography and lift-off

Falk Lehmann, Gunther Richter, T.B. Borzenko et al. · Microelectronic Engineering · 2003 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +14

Use of polymethylmethacrylate for pattern transfer by ion beam etching: Improvement of etching homogeneity and patterning quality

Y. Koval, T.B. Borzenko, S. V. Dubonos · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 12 citations

Engineering, Materials Engineering, Materials Science +16

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