Concepedia

Misako Yamaguchi

MY

2

Publications

46

Citations

2

H-Index

1994

Active since

Affiliations

Hitachi (Japan)(Current)

Misako Yamaguchi is an author at Hitachi (Japan) specializing in applied physics, hydrogen, and electrical engineering.

Top concepts

HydrogenEngineeringApplied PhysicsElectrical EngineeringChemistryPhotovoltaicsMicroelectronicsMicrofabricationCrystalline DefectsIntegrated Circuits

Publications per year

1994–1996

2

Publications

2

Effect of Hydrogen-Radical Annealing for SiO<sub>2</sub> Passivation

Hiroshi Nagayoshi, Yuichi Onozawa, Makoto Ikeda et al. · Japanese Journal of Applied Physics · 1996 · 23 citations

Engineering, Optoelectronic Devices, Integrated Circuits +16

High-Rate Selective Etching of a-Si:H Using Hydrogen Radicals

Hiroshi Nagayoshi, Misako Yamaguchi, Kōichi Kamisako · Japanese Journal of Applied Physics · 1994 · 23 citations

Chemical Engineering, Electrical Engineering, Hydrogen Radicals +10

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