Misako Yamaguchi - Concepedia

Author

Misako Yamaguchi

Also Known As

Misako YAMAGUCHI, Misako Yamaguchi

Publications

Citations

H-Index

Concepts

All Affiliations

Misako Yamaguchi is an author at Hitachi (Japan) specializing in applied physics, hydrogen, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	46
2	Applied Physics	2	2	46
3	Electrical Engineering	2	2	46
4	Chemical Engineering	1	1	23
5	Chemistry	1	1	23

Misako Yamaguchi

Publications

Citations

H-Index

Page 1

	Year	Citations
Effect of Hydrogen-Radical Annealing for SiO<sub>2</sub> Passivation Hiroshi Nagayoshi, Yuichi Onozawa, Makoto Ikeda, Japanese Journal of Applied Physics EngineeringOptoelectronic DevicesIntegrated CircuitsChemistrySilicon On Insulator	1996	23
High-Rate Selective Etching of a-Si:H Using Hydrogen Radicals Hiroshi Nagayoshi, Misako Yamaguchi, Kōichi Kamisako Japanese Journal of Applied Physics Chemical EngineeringElectrical EngineeringHydrogen RadicalsEngineeringMicrofabrication	1994	23

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