Concepedia

K. Tokunaga

KT

Statistics

Publications

2

Citations

115

H-Index

2

Active since

1980

Affiliations

University of California, Berkeley(Current)

K. Tokunaga is an author at University of California, Berkeley specializing in surface engineering, surface science, and etching processes.

Publications per year

1980–1981

2

Publications

2

Comparison of Aluminum Etch Rates in Carbon Tetrachloride and Boron Trichloride Plasmas

K. Tokunaga, Fritz Redeker, D. A. Danner et al. · Journal of The Electrochemical Society · 1981 · 78 citations

, , +17

Aluminum Etching in Carbon Tetrachloride Plasmas

K. Tokunaga, Dennis W. Hess · Journal of The Electrochemical Society · 1980 · 37 citations

, , +17

1–2 of 2