Concepedia

Ki-Myung Chang

KC

2

Publications

186

Citations

2

H-Index

2000

Active since

Affiliations

Gwangju Institute of Science and Technology(Current)

Ki-Myung Chang is an author at Gwangju Institute of Science and Technology specializing in applied physics, microelectronics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMicroelectronicsPhysicsChemistryNanoelectronicsSurface ScienceMaterial ScienceChemical Engineering

Publications per year

2000–2000

2

Publications

2

Dry etch damage in <i>n</i>-type GaN and its recovery by treatment with an N2 plasma

Ji-Myon Lee, Ki-Myung Chang, Sang‐Woo Kim et al. · Journal of Applied Physics · 2000 · 147 citations

Wide-bandgap Semiconductor, Electrical Engineering, Damage Recovery +13

Highly selective dry etching of III nitrides using an inductively coupled Cl2/Ar/O2 plasma

Ji-Myon Lee, Ki-Myung Chang, In‐Hwan Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 39 citations

Engineering, Cubic Boron Nitride, Chemistry +16

Rows per page

1–2 of 2