Concepedia

R. Beckmann

RB

Statistics

Publications

11

Citations

330

H-Index

11

Active since

1990

Affiliations

University of Kassel(Current)

Max Planck Society

Max Planck Institute for Plasma Physics

R. Beckmann is an author at University of Kassel specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceMaterials EngineeringElectrical EngineeringPhysicsNucleationMicrostructure

Publications per year

1990–2012

11

Publications

11

Investigation of the bias nucleation process in microwave plasma-enhanced chemical vapour deposition of diamond

R. Beckmann, B. Sobisch, W. Kulisch et al. · Diamond and Related Materials · 1994 · 46 citations

Materials Engineering, Materials Science, Diamond-like Carbon +6

Deposition of microcrystalline intrinsic silicon by the Electrical Asymmetry Effect technique

D. Hrunski, F. Mootz, A. Zeuner et al. · Vacuum · 2012 · 40 citations

Materials Science, Microcrystalline Intrinsic Silicon, Electrical Engineering +11

The electrical properties of zinc in silicon

Sharon M. Weiss, R. Beckmann, Rainer Kassing · Applied Physics A · 1990 · 40 citations

Electrical Engineering, Engineering, Intrinsic Impurity +4

Characterization of the bias nucleation process

W. Kulisch, B. Sobisch, M. Kuhr et al. · Diamond and Related Materials · 1995 · 34 citations

Engineering, Physics, Natural Sciences +4

Structure of plasma-deposited amorphous hydrogenated boron-carbon thin films

A. Annen, M. Saß, R. Beckmann et al. · Thin Solid Films · 1998 · 33 citations

Materials Science, Boron Nitride, Engineering +5

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