Statistics
Publications
4
Citations
76
H-Index
4
Active since
2004
Affiliations
Yoshinori Kojima is an author at National Institute of Technology, Yonago College specializing in microelectronics, electron beam optics, and mask design.
Publications per year
2004–2020
4
4
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
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