Concepedia

Heinrich Körner

HK

Statistics

Publications

3

Citations

63

H-Index

3

Active since

2001

Affiliations

Infineon Technologies (Germany)(Current)

Heinrich Körner is an author at Infineon Technologies (Germany) specializing in materials science, materials engineering, and microelectronics.

Top concepts

Publications per year

2001–2004

3

Publications

3

Comparison of copper damascene and aluminum RIE metallization in BICMOS technology

H. Helneder, Heinrich Körner, Arnan Mitchell et al. · Microelectronic Engineering · 2001 · 27 citations

, , +13

Thermal and dielectric breakdown for metal insulator metal capacitors (MIMCAP) with tantalum pentoxide dielectric

K.-H. Allers, R. Schwab, C. W. Walter et al. · 2003 · 21 citations

, , +16

Improvement of mechanical integrity of ultra low k dielectric stack and CMP compatibility

K. Schulze, Stefan E. Schulz, S. Frühauf et al. · Microelectronic Engineering · 2004 · 15 citations

, , +9

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