Concepedia

Yuuichiro Yamazaki

YY

3

Publications

44

Citations

3

H-Index

2003

Active since

Affiliations

Toshiba (Japan)(Current)

Yuuichiro Yamazaki is an author at Toshiba (Japan) specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringEducationMicroscopyCalibrationMeasurementApplied PhysicsInstrumentationElectrical EngineeringInspectionImage Analysis

Publications per year

2003–2010

3

Publications

3

Development of EB inspection system EBeyeM for EUV mask

Takashi Hirano, Shinji Yamaguchi, Masato Naka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 18 citations

Engineering, Inspection, Electron-beam Lithography +20

Advanced lithography: wafer defect scattering analysis at DUV

Doron Meshulach, Ido Dolev, Yuuichiro Yamazaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations

Defect Tolerance, Electrical Engineering, Lithography Process +15

Three-dimensional measurement by tilting and moving objective lens in CD-SEM

Kouji Kimura, Kazuo Abe, Yasuko Tsuruga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 11 citations

Engineering, Microscopy, Measurement +22

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