Statistics
Publications
4
Citations
194
H-Index
4
Active since
2006
Affiliations
The University of Osaka(Current)
Katsuhisa Kugimiya is an author at The University of Osaka specializing in etching processes, materials science, and thin film etching.
Publications per year
2006–2022
4
4
Hiroichi Kawahira, Nobuyuki Matsuzawa, Eriko Matsui et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 27 citations
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