Concepedia

Mei Chang

MC

6

Publications

214

Citations

6

H-Index

1984

Active since

Affiliations

Applied Materials (United States)(Current)

Lawrence Berkeley National Laboratory

Mei Chang is an author at Applied Materials (United States) specializing in surface science, engineering, and materials engineering.

Top concepts

EngineeringSurface ScienceApplied PhysicsMaterials EngineeringChemistryThin FilmsMaterial ScienceCorrosionMicrostructureNanotechnology

Publications per year

1984–2010

6

Publications

6

Graft Copolymers with Regularly Spaced, Tetrafunctional Branch Points: Morphology and Grain Structure

Frederick L. Beyer, Samuel P. Gido, Christine Büschl et al. · Macromolecules · 2000 · 112 citations

Whisker growth in reduction of oxides

Mei Chang, Lutgard C. De Jonghe · Metallurgical Transactions B · 1984 · 28 citations

Materials Engineering, Gaseous Reduction, Engineering +5

Interreaction Between Al <sub>2</sub> O <sub>3</sub> and a CaO‐Al <sub>2</sub> O <sub>3</sub> Melt

Lutgard C. De Jonghe, Herbert Schmid, Mei Chang · Journal of the American Ceramic Society · 1984 · 25 citations

Development of tungsten nitride film as barrier layer for copper metallization

Seshadri Ganguli, Ling Chen, Timothy E. Levine et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 23 citations · Full text

Engineering, Thin Film Process Technology, Chemical Deposition +16

Highly Selective SiO<sub>2</sub> Etch Employing Inductively Coupled Hydro-Fluorocarbon Plasma Chemistry for Self Aligned Contact Etch

Yukio Iijima, Yoshio ISHIKAWA, Mei Chang et al. · Japanese Journal of Applied Physics · 1997 · 16 citations

Chemical Engineering, Engineering, Hydro-fluorocarbon Gas +10

Rows per page

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