Statistics
Publications
4
Citations
139
H-Index
4
Active since
1990
Affiliations
Carnegie Mellon University(Current)
Chi-Min Yuan is an author at Carnegie Mellon University specializing in engineering, manufacturing engineering, and device modeling.
Publications per year
1990–2009
4
4
<title>Automated optical proximity correction: a rules-based approach</title>
O.W. Otto, Joseph G. Garofalo, Kevin Low et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 81 citations
Engineering, Manufacturing Engineering, Computational Geometry +14
Modeling of optical alignment and metrology schemes used in integrated circuit manufacturing
Chi-Min Yuan, Andrzej J. Strojwas · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 20 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +10
Hotspot detection and design recommendation using silicon calibrated CMP model
Colin Hui, Xian Bin Wang, Haigou Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 11 citations
Engineering, Manufacturing Engineering, Computer-aided Design +14
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