Concepedia
Statistics
Publications
6
Citations
181
H-Index
Active since
1973
Affiliations
Mitsubishi Electric (United States)(Current)
Mitsubishi Electric (Japan)
Mitsubishi Electric (Germany)
Tatsuya Enomoto is an author at Mitsubishi Electric (United States) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringSurface ScienceMaterial ScienceMicrofabricationComputer EngineeringMaterials EngineeringModeling And Simulation
Publications per year
1973–1988
Thermal Oxidation Rate of a Si<sub>3</sub>N<sub>4</sub>Film and Its Masking Effect against Oxidation of Silicon
Tatsuya Enomoto, Ryo Ando, Hiroshi Morita et al. · Japanese Journal of Applied Physics · 1978 · 53 citations
Materials Science, Engineering, Masking Effect +12
Etching Characteristics of Silicon and its Compounds by Gas Plasma
Haruhiko Abe, Yukio Sonobe, Tatsuya Enomoto · Japanese Journal of Applied Physics · 1973 · 43 citations
Materials Science, Materials Engineering, Electrical Engineering +8
Delay-Time Modeling for ED MOS Logic LSI
T. Tokuda, Kaoru Okazaki, K. Sakashita et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1983 · 34 citations
Logic Synthesis, Propagation Delay Time, Electrical Engineering +14
Loading Effect and Temperature Dependence of Etch Rate in CF<sub>4</sub>Plasma
Tatsuya Enomoto, Masahiko Denda, A. Yasuoka et al. · Japanese Journal of Applied Physics · 1979 · 29 citations
Activation Energy, Engineering, Physics +14
Effects of Nitride Deposition Conditions on Characteristics of an MNOS Nonvolatile Memory Transistor
Haruo Nakayama, Tatsuya Enomoto · Japanese Journal of Applied Physics · 1979 · 11 citations
Materials Engineering, Non-volatile Memory, Electrical Engineering +10
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