Carl-Fredrik Carlström

Cl 2 ∕ O 2 -inductively coupled plasma etching of deep hole-type photonic crystals in InP

Carl-Fredrik Carlström, Rob van der Heijden, F. Karouta et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 43 citations · Full text

Optical Materials, Engineering, Optoelectronic Devices +19

InP-based two-dimensional photonic crystals filled with polymers

Rob van der Heijden, Carl-Fredrik Carlström, Juri Snijders et al. · Applied Physics Letters · 2006 · 43 citations · Full text

Materials Science, Photonics, Photonic Sensor +13

Low energy ion beam etching of InP using methane chemistry

Carl-Fredrik Carlström, G. Landgren, S. Anand · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 21 citations

Engineering, Electron-beam Lithography, Vacuum Device +16

Incoupling waveguide holograms for simultaneous focusing into multiple arbitrary positions

Johan Backlund, Jörgen Bengtsson, Carl-Fredrik Carlström et al. · Applied Optics · 1999 · 19 citations

Photonics, Holography, Engineering +13

Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Carl-Fredrik Carlström, Rob van der Heijden, M. S. P. Andriesse et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 18 citations · Full text

Engineering, Electron-beam Lithography, Vacuum Device +18