Ron Varghese

Large Area, 38 nm Half-Pitch Grating Fabrication by Using Atomic Spacer Lithography from Aluminum Wire Grids

Xiaoming Liu, Xuegong Deng, P.F. Sciortino et al. · Nano Letters · 2006 · 40 citations

Monolithically integrated circular polarizers with two-layer nano-gratings fabricated by imprint lithography

Jim J. Wang, Feng Liu, Xuegong Deng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 25 citations

Engineering, Optoelectronic Devices, Micro-optical Component +18

Filling high aspect-ratio nano-structures by atomic layer deposition and its applications in nano-optic devices and integrations

Jim J. Wang, Xuegong Deng, Ron Varghese et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 24 citations

Engineering, Beam Lithography, Nanolithography +16

High-performance optical retarders based on all-dielectric immersion nanogratings

Jim J. Wang, Xuegong Deng, Ron Varghese et al. · Optics Letters · 2005 · 16 citations

Materials Science, Optical Materials, Engineering +13

BaTiO₃ Integration with Nanostructured Epitaxial (100), (110), and (111) Germanium for Multifunctional Devices

Mantu K. Hudait, Yan Zhu, Nikhil Jain et al. · ACS Applied Materials & Interfaces · 2013 · 11 citations