James T. Fahey - Concepedia

Author

James T. Fahey

Also Known As

J. T. Fahey, James T. Fahey

Publications

Citations

H-Index

Concepts

All Affiliations

James T. Fahey is an author at IBM Research - Almaden specializing in chemical engineering, optical properties, and photochemistry.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	14
2	Applied Physics	1	1	14
3	Chemical Engineering	1	1	14
4	Chemistry	1	1	14
5	Materials Science	1	1	14

James T. Fahey

Publications

Citations

H-Index

Page 1

	Year	Citations
Design of a bottom antireflective layer for optical lithography James T. Fahey, Wayne M. Moreau, Kevin M. Welsh, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Barc LayerOptical MaterialsEngineeringDuv LithographySynthetic Photochemistry	1994	14
Resist system based on the cationic photocrosslinking of poly(4‐hydroxystyrene) and polyfunctional electrophiles James T. Fahey, Ken D. Shimizu, Jean M. J. Fréchet, Journal of Polymer Science Part A Polymer Chemistry	1993	10

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