Concepedia

Phuc Van

PV

Statistics

Publications

3

Citations

42

H-Index

3

Active since

2004

Affiliations

Taiwan Semiconductor Manufacturing Company (United States)(Current)

Phuc Van is an author at Taiwan Semiconductor Manufacturing Company (United States) specializing in metrology, engineering, and materials science.

Publications per year

2004–2005

3

Publications

3

Novel noncontact thickness metrology for backend manufacturing of wide bandgap light emitting devices

Wojtek J. Walecki, Kevin Lai, Vitalij Souchkov et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2005 · 15 citations

, , +16

Low-coherence interferometric absolute distance gauge for study of MEMS structures

W. J. Walecki, Kevin Lai, Alexander Pravdivtsev et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 15 citations

, , +16

Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures

W. J. Walecki, Frank Wei, Phuc Van et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 12 citations

, , +17

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