Concepedia

S. Lynn

SL

Statistics

Publications

3

Citations

80

H-Index

3

Active since

2009

Affiliations

National University of Ireland, Maynooth(Current)

S. Lynn is an author at National University of Ireland, Maynooth specializing in manufacturing engineering, etch rate, and engineering.

Publications per year

2009–2010

3

Publications

3

Estimation and Control in Semiconductor Etch: Practice and Possibilities

John V. Ringwood, S. Lynn, Giorgio Bacelli et al. · IEEE Transactions on Semiconductor Manufacturing · 2010 · 41 citations

, , +16

Identifying key process characteristics and predicting etch rate from high-dimension datasets

Emanuele Ragnoli, Seán McLoone, S. Lynn et al. · 2009 · 24 citations

, , +15

Gaussian process regression for virtual metrology of plasma etch

S. Lynn, John V. Ringwood, Niall MacGearailt · 2010 · 15 citations

, , +17

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