Shaoqun Shen

Effects of electrostatic forces generated by the driving signal on capacitive sensing devices

Minhang Bao, Heng Yang, Hao Yin et al. · Sensors and Actuators A Physical · 2000 · 51 citations

Capacitive Sensing Devices, Electrical Engineering, Non-contact Sensing +1

A piezoresistive accelerometer with a novel vertical beam structure

Hong Chen, Minhang Bao, Haijun Zhu et al. · Sensors and Actuators A Physical · 1997 · 51 citations

Engineering, Mechatronics, Mechanical Systems +6

A micromachined piezoresistive angular rate sensor with a composite beam structure

Xinxin Li, Minhang Bao, Heng Yang et al. · Sensors and Actuators A Physical · 1999 · 45 citations

Engineering, Microfabrication, Mechanical Engineering +11

Maskless etching of three-dimensional silicon structures in KOH

Xinxin Li, Minhang Bao, Shaoqun Shen · Sensors and Actuators A Physical · 1996 · 42 citations

Engineering, Microfabrication, Surface Science +7

Over-range capacity of a piezoresistive microaccelerometer

Hong Chen, Shaoqun Shen, Minhang Bao · Sensors and Actuators A Physical · 1997 · 30 citations

Engineering, Microfabrication, Calibration +7