Concepedia

Author

Toshikazu Shibayama

Tokai University

Also Known As

Toshikazu Shibayama

3

Publications

60

Citations

2

H-Index

11

Concepts

All Affiliations

Tokai University
TS

About

Toshikazu Shibayama is an author at Tokai University specializing in microfabrication, instrumentation, and integrated circuits.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

57

2

Applied Physics

1

1

57

3

Electrical Engineering

1

1

57

4

Materials Science

1

1

57

5

Physics

1

1

57

Toshikazu Shibayama

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1

Publications

57

Citations

1

H-Index

YearCitations

Silicon etching by alternating irradiations of negative and positive ions

Toshikazu Shibayama, Haruo Shindo, Yasuhiro Horiike

Plasma Sources Science and Technology

1996

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