Concepedia

Toshikazu Shibayama

TS

1

Publications

57

Citations

1

H-Index

1996

Active since

Affiliations

Tokai University(Current)

Toshikazu Shibayama is an author at Tokai University specializing in microfabrication, instrumentation, and integrated circuits.

Top concepts

PhysicsEngineeringApplied PhysicsInstrumentationOptoelectronicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationIntegrated Circuits

Publications per year

1996–1996

1

Publications

1

Silicon etching by alternating irradiations of negative and positive ions

Toshikazu Shibayama, Haruo Shindo, Yasuhiro Horiike · Plasma Sources Science and Technology · 1996 · 57 citations

Engineering, Integrated Circuits, Silicon On Insulator +18

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