Concepedia

Greg Shinn

GS

3

Publications

69

Citations

3

H-Index

1995

Active since

Affiliations

Texas Instruments (United States)(Current)

Greg Shinn is an author at Texas Instruments (United States) specializing in microfabrication, materials science, and engineering.

Top concepts

Publications per year

1995–2000

3

Publications

3

Postchemical‐Mechanical Planarization Cleanup Process for Interlayer Dielectric Films

Sudipto R. Roy, Iqbal Ali, Greg Shinn et al. · Journal of The Electrochemical Society · 1995 · 47 citations

, , +14

Optimization of the Chemical Mechanical Polishing Process for Premetal Dielectrics

Simon J. Fang, Santos Garza, Honglin Guo et al. · Journal of The Electrochemical Society · 2000 · 12 citations

, , +21

Physical Characterization of Chemical Mechanical Planarized Surface for Trench Isolation

Iqbal Ali, M. Rödder, Sudipto R. Roy et al. · Journal of The Electrochemical Society · 1995 · 10 citations

, , +19

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