J.S. Maa

On the preparation of CuInS2 thin films by flash evaporation

H. L. Hwang, Chengcai Tu, J.S. Maa et al. · Solar Energy Materials · 1980 · 42 citations

Materials Science, Engineering, Surface Science +7

A system for <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> studies of plasma–surface interactions using x-ray photoelectron spectroscopy

John L. Vossen, J. H. Thomas, J.S. Maa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 28 citations

X-ray Spectroscopy, Engineering, Plasma Science +20

Preparation of surfaces for high quality interface formation

J. L. Vossen, J. H. Thomas, J.S. Maa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 26 citations

Engineering, Plasma Processing, Surface Technology +17

X-ray photoelectron spectroscopy study of the surface chemistry of freon-oxygen plasma etched silicon

J. H. Thomas, J.S. Maa · Applied Physics Letters · 1983 · 22 citations

Materials Science, Engineering, Surface Chemistry +15

Phosphorus out diffusion from double-layered tantalum silicide/polycrystalline silicon structure

J.S. Maa, C. W. Magee, J. J. O’Neill · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 15 citations

Materials Engineering, Materials Science, High-temperature Annealing +13