Author
Yoshiyuki Ito
Also Known As
Y Ito, Y. ITO, Y. Ito, Yoshiyuki Ito, Yoshiyuki Ito Yoshiyuki Ito
46
Publications
1.3K
Citations
11
H-Index
87
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 11 | 12 | 1.2K |
2 | Applied Physics | 3 | 3 | 118 |
3 | Civil Engineering | 2 | 2 | 65 |
4 | Computer Engineering | 2 | 2 | 59 |
5 | Health Sciences | 1 | 1 | 14 |
Yoshiyuki Ito
×
13
Publications
1.2K
Citations
11
H-Index
| Year | Citations | |
|---|---|---|
2003 | 578 | |
2004 | 367 | |
2003 | 81 | |
1972 | 52 | |
1986 | 43 | |
2005 | 23 | |
2002 | 16 | |
Characterization of cross-sectional profile of resist L/S and hole pattern using CD-SAXS Yoshiyuki Ito, Akihiro Higuchi, Kazuhiko Omote Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Cross-sectional ProfileEngineeringX-ray SpectroscopyMicroscopyElectron Diffraction | 2016 | 14 |
2019 | 14 | |
1971 | 13 |
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