Concepedia

Shigeru Kawamura

SK

Statistics

Publications

2

Citations

123

H-Index

2

Active since

2003

Affiliations

Tokyo Electron (Japan)(Current)

Shigeru Kawamura is an author at Tokyo Electron (Japan) specializing in materials engineering, chemical engineering, and waste treatment.

Publications per year

2003–2016

2

Publications

2

Small angle x-ray scattering for measuring pore-size distributions in porous low-κ films

Kazuhiko Omote, Yoshiyuki Ito, Shigeru Kawamura · Applied Physics Letters · 2003 · 81 citations

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Leaching and Adsorption of Gold from Waste Printed Circuit Boards Using Iodine-Iodide Solution and Activated Carbon

Batnasan Altansukh, Kazutoshi Haga, Ariunbolor Narankhuu et al. · Engineering Journal · 2016 · 42 citations · Full text

, , +17

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