Seung‐Ki Chae

Sizing Accuracy, Counting Efficiency, Lower Detection Limit and Repeatability of a Wafer Surface Scanner for Ideal and Real‐World Particles

Benjamin Y. H. Liu, Seung‐Ki Chae, Gwi–Nam Bae · Journal of The Electrochemical Society · 1993 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +17

A Water Polishing Process to Improve Ceria Abrasive Removal

Seok‐Jun Hong, Juhwan Kim, Johee Won et al. · ECS Journal of Solid State Science and Technology · 2019 · 27 citations

Engineering, Materials Engineering, Materials Science +17

Theoretical and Experimental Particle Size Response of Wafer Surface Scanners

HaeOk S. Lee, Seung‐Ki Chae, Yan Ye et al. · Aerosol Science and Technology · 1991 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

Influence of Particle Refractive Index on the Lower Detection Limit of Light Scattering Aerosol Counters

Seong-Ho Yoo, Seung‐Ki Chae, Benjamin Y. H. Liu · Aerosol Science and Technology · 1996 · 20 citations · Full text

Natural Sciences, Chemistry, Materials Characterization +14

Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry

Cheolmin Shin, Jinhak Choi, Donggeon Kwak et al. · ECS Journal of Solid State Science and Technology · 2019 · 14 citations · Full text

Engineering, Chemical Engineering, Materials Science +17