Concepedia

Takashi Kiuchi

TK

1

Publications

38

Citations

1

H-Index

1996

Active since

Affiliations

Fujitsu (Japan)(Current)

Takashi Kiuchi is an author at Fujitsu (Japan) specializing in semiconductor interfaces, materials fabrication, and synchrotron radiation.

Top concepts

PhotonicsMicroscopyBeamformingEngineeringApplied PhysicsInstrumentationOptoelectronicsMicroelectronicsMicrofabricationIntegrated Circuits

Publications per year

1996–1996

1

Publications

1

Multielectron beam blanking aperture array system SYNAPSE-2000

Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 38 citations

Engineering, Electron-beam Lithography, Sensor Array +21

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