Concepedia

S.-M. Suh

SS

5

Publications

166

Citations

5

H-Index

2000

Active since

Affiliations

University of Minnesota(Current)

S.-M. Suh is an author at University of Minnesota specializing in chemical kinetics, engineering, and chemical engineering.

Top concepts

Publications per year

2000–2002

5

Publications

5

Numerical Modeling of Gas-Phase Nucleation and Particle Growth during Chemical Vapor Deposition of Silicon

Steven L. Girshick, Mark T. Swihart, S.-M. Suh et al. · Journal of The Electrochemical Society · 2000 · 51 citations

, , +20

Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, modeling, and film properties

T. Kim, S.-M. Suh, Steven L. Girshick et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 41 citations

, , +18

Modeling particle formation during low-pressure silane oxidation: Detailed chemical kinetics and aerosol dynamics

S.-M. Suh, M. R. Zachariah, Steven L. Girshick · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 36 citations

, , +13

Numerical modeling of silicon oxide particle formation and transport in a one-dimensional low-pressure chemical vapor deposition reactor

S.-M. Suh, M. R. Zachariah, Steven L. Girshick · Journal of Aerosol Science · 2002 · 24 citations

, , +11

Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas

S.-M. Suh, Steven L. Girshick, Uwe Kortshagen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 14 citations

, , +14

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