S.-M. Suh - Concepedia

Author

S.-M. Suh

Also Known As

S-M. Suh, S.-M. Suh

Publications

177

Citations

H-Index

Concepts

All Affiliations

S.-M. Suh is an author at University of Minnesota specializing in chemical kinetics, engineering, and chemical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	166
2	Applied Physics	4	4	130
3	Chemical Engineering	4	4	142
4	Chemistry	4	4	142
5	Natural Sciences	2	2	92

S.-M. Suh

Publications

166

Citations

H-Index

Page 1

	Year	Citations
Numerical Modeling of Gas-Phase Nucleation and Particle Growth during Chemical Vapor Deposition of Silicon Steven L. Girshick, Mark T. Swihart, S.-M. Suh, Journal of The Electrochemical Society EngineeringChemistryChemical DepositionSilicon On InsulatorChemical Engineering	2000	51
Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, modeling, and film properties T. Kim, S.-M. Suh, Steven L. Girshick, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringVacuum DeviceChemistryChemical DepositionExplosions	2002	41
Modeling particle formation during low-pressure silane oxidation: Detailed chemical kinetics and aerosol dynamics S.-M. Suh, M. R. Zachariah, Steven L. Girshick Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Particle FormationChemical EngineeringAerosol DynamicsEngineeringHigh Temperature Aerosol	2001	36
Numerical modeling of silicon oxide particle formation and transport in a one-dimensional low-pressure chemical vapor deposition reactor S.-M. Suh, M. R. Zachariah, Steven L. Girshick Journal of Aerosol Science Particle FormationEngineeringNumerical SimulationApplied PhysicsTransport Phenomena	2002	24
Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas S.-M. Suh, Steven L. Girshick, Uwe Kortshagen, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films High DensityChemical EngineeringEngineeringPlasma ProcessingSurface Science	2002	14

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