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Numerical modeling of silicon oxide particle formation and transport in a one-dimensional low-pressure chemical vapor deposition reactor

Particle FormationEngineeringNumerical SimulationApplied PhysicsTransport PhenomenaThermodynamicsNumerical ModelingMultiphase FlowGas-liquid FlowMicroelectronicsChemical DepositionChemical KineticsChemical Vapor DepositionSilicon On Insulator