Concepedia

Dongxing Yang

DY

1

Publications

21

Citations

1

H-Index

2003

Active since

Affiliations

University of North Carolina at Chapel Hill(Current)

Dongxing Yang is an author at University of North Carolina at Chapel Hill specializing in engineering, microelectronics, and microfabrication.

Top concepts

ChemistryEngineeringSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical Engineering

Publications per year

2003–2003

1

Publications

1

HF Etchant Solutions in Supercritical Carbon Dioxide for “Dry” Etch Processing of Microelectronic Devices

Charles Jones, Dongxing Yang, E. A. Irene et al. · Chemistry of Materials · 2003 · 21 citations

Materials Science, Chemical Engineering, Engineering +15

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