Statistics
Publications
4
Citations
128
H-Index
4
Active since
1985
Affiliations
Tohoku University(Current)
Sadayuki Ishikawa is an author at Tohoku University specializing in natural sciences, materials engineering, and materials science.
Publications per year
1985–2002
4
4
Masato Koike, Takeshi Namioka, Eric M. Gullikson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 19 citations
Natural Sciences, Physics, Optics +14
Fluoropolymer-based resists for a single-resist process of 157 nm lithography
Masaki Toriumi, Taku Yamazaki, T. Furukawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +16
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