Concepedia

Jongkook Song

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Publications

1

Citations

39

H-Index

1

Active since

2002

Affiliations

Hanyang University(Current)

Jongkook Song is an author at Hanyang University specializing in microfabrication, surface modification, and environmental engineering.

Top concepts

Publications per year

2002–2002

1

Publications

1

Low temperature remote plasma cleaning of the fluorocarbon and polymerized residues formed during contact hole dry etching

Hyungtak Seo, Sung Bae Kim, Jongkook Song et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 39 citations

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