Statistics
Publications
1
Citations
89
H-Index
1
Active since
2007
Affiliations
ASML (Netherlands)(Current)
Eddy van der Heijden is an author at ASML (Netherlands) specializing in engineering, electron beam lithography, and overlay metrology.
Publications per year
2007–2007
1
1
Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
Mircea Dusa, John Quaedackers, Olaf F. A. Larsen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 89 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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