Jin-Hyung Park

Corrosion Inhibitors in Sodium Periodate Slurry for Chemical Mechanical Planarization of Ruthenium Film

Hao Cui, Jin-Hyung Park, Jea‐Gun Park · ECS Journal of Solid State Science and Technology · 2013 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

Super fine cerium hydroxide abrasives for SiO2 film chemical mechanical planarization performing scratch free

Young-Hye Son, Gi-Ppeum Jeong, Pil-Su Kim et al. · Scientific Reports · 2021 · 21 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Dishing-free chemical mechanical planarization for copper films

Sang-Su Yun, Young-Hye Son, Gi-Ppeum Jeong et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2021 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +12

Potassium Permanganate as Oxidizer in Alkaline Slurry for Chemical Mechanical Planarization of Nitrogen-doped Polycrystalline Ge[sub 2]Sb[sub 2]Te[sub 5] Film

Hao Cui, Jong-Young Cho, Hee-Sub Hwang et al. · Journal of The Electrochemical Society · 2010 · 17 citations

Engineering, Materials Engineering, Materials Science +16

Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization

Eun-Bin Seo, Jae-Young Bae, Sung In Kim et al. · ECS Journal of Solid State Science and Technology · 2020 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17