T. T. Chen

Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching

Forest Shih-Sen Chien, C.-L. Wu, Y. C. Chou et al. · Applied Physics Letters · 1999 · 93 citations

Engineering, Integrated Circuits, Silicon On Insulator +21

Nanometer-scale conversion of Si3N4 to SiOx

Forest Shih-Sen Chien, Jan-Hau Chang, Shiaw-Ruey Lin et al. · Applied Physics Letters · 2000 · 85 citations

Materials Science, Molecular Sieve, Engineering +14

Nano-oxidation of silicon nitride films with an atomic force microscope: Chemical mapping, kinetics, and applications

Forest Shih-Sen Chien, Y. C. Chou, T. T. Chen et al. · Journal of Applied Physics · 2001 · 55 citations

Engineering, Chemistry, Silicon On Insulator +21

Oxidation states in scanning-probe-induced Si3N4 to SiOx conversion studied by scanning photoemission microscopy

Ruth Klauser, I.-H. Hong, Haw‐Lih Su et al. · Applied Physics Letters · 2001 · 34 citations

Engineering, Chemistry, Silicon On Insulator +19

Charge imaging and manipulation using carbon nanotube probes

Shien‐Der Tzeng, C. L. Wu, T. T. Chen et al. · Applied Physics Letters · 2002 · 25 citations

Ideal Probes, Engineering, Microscopy +21