K. Tsui

Microelectromechanical system assembled ion optics: An advance to miniaturization and assembly of electron and ion optics

J.D. Fox, Rahul Saini, K. Tsui et al. · Review of Scientific Instruments · 2009 · 22 citations

Manufacturable MEMS microcolumn

Rahul Saini, Z. Jandric, K. Tsui et al. · Microelectronic Engineering · 2004 · 18 citations

Manufacturable Mems Microcolumn, Engineering, Micromachines +3

Assembled micro-electromechanical-systems microcolumn from a single layer silicon process

Rahul Saini, Z. Jandric, K. Tsui et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 13 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +19

Assembly technology across multiple length scales from the micro-scale to the nano-scale

George D. Skidmore, M. Ellis, A. Geisberger et al. · 2004 · 13 citations

Engineering, Three-dimensional Mems Assemblies, Microelectromechanical Systems +23