Statistics
Publications
1
Citations
11
H-Index
1
Active since
1993
Affiliations
Panasonic (Japan)(Current)
Takuhiro Ono is an author at Panasonic (Japan) specializing in laser applications, optical properties, and optical materials.
Publications per year
1993–1993
1
1
Performance of 0.2 μm optical lithography using KrF and ArF excimer laser sources
Kazuhiro Yamashita, Masayuki Endo, Masaru Sasago et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 11 citations
Optical Materials, Engineering, Electron-beam Lithography +23
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