Tadatsugu Itoh is an author at Waseda University specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceCrystalline DefectsElectrical EngineeringSemiconductorsSurface SciencePhysicsThin FilmsMaterials Engineering
Publications per year
1968–1986
20
20
DOPING OF SILICON BY ION IMPLANTATION
Tadatsugu Itoh, Taroh Inada, Kiyoshi Kanekawa · Applied Physics Letters · 1968 · 33 citations
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1–5 of 20