Concepedia
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Publications
1
Citations
18
H-Index
Active since
2005
Kazuya Urata is an author specializing in etch rate, surface chemistry, and plasma physics.
Publications per year
2005–2005
Quantitative control of etching reactions on various SiOCH materials
Tomoaki Tatsumi, Kazuya Urata, Kazunori Nagahata et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +16
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