C.-F. Chiang

The long path from MEMS resonators to timing products

E. Ng, Yushi Yang, Vu A. Hong et al. · 2015 · 32 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

A NOVEL, HIGH-RESOLUTION RESONANT THERMOMETER USED FOR TEMPERATURE COMPENSATION OF A COFABRICATED PRESSURE SENSOR

C.-F. Chiang, A.B. Graham, Eldwin J. Ng et al. · 2012 · 20 citations · Full text

Engineering, Mechanical Engineering, Heat Transfer +15

Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems

Eldwin J. Ng, Chang-Nam Ahn, Yushi Yang et al. · 2013 · 18 citations

Engineering, Electrical Engineering, Materials Science +17

Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning

Eldwin J. Ng, C.-F. Chiang, Yushi Yang et al. · 2013 · 14 citations

Engineering, Electrical Engineering, Materials Science +17

ULTRA-STABLE EPITAXIAL POLYSILICON RESONATORS

Eldwin J. Ng, S. Wang, D. Buchman et al. · 2012 · 11 citations · Full text

Engineering, Materials Engineering, Materials Science +17