Concepedia

M. Spadafora

MS

Statistics

Publications

5

Citations

152

H-Index

5

Active since

2001

Affiliations

University of Catania(Current)

University of Padua

Institute for Microelectronics and Microsystems

M. Spadafora is an author at University of Catania specializing in applied physics, electronic packaging, and engineering.

Top concepts

EngineeringApplied PhysicsElectronic PackagingSurface ScienceMaterial ScienceMicroelectronicsThin FilmsCrystalline DefectsMaterials EngineeringElectrical Engineering

Publications per year

2001–2005

5

Publications

5

The Effects of Music on Cardiac Patients on Bed Rest

Mary E. Cadigan, N. Caruso, Sioban M. Haldeman et al. · Progress in Cardiovascular Nursing · 2001 · 63 citations

Oxidation rate enhancement of SiGe epitaxial films oxidized in dry ambient

M. Spadafora, Giuseppe Privitera, A. Terrasi et al. · Applied Physics Letters · 2003 · 34 citations

Engineering, Sige Oxidation, Thin Oxides +19

Rapid thermal oxidation of epitaxial SiGe thin films

A. Terrasi, Silvia Scalese, R Adorno et al. · Materials Science and Engineering B · 2002 · 24 citations

Engineering, Rapid Thermal Oxidation, Silicon On Insulator +5

Silicon interstitial injection during dry oxidation of SiGe∕Si layers

E. Napolitani, M. Di Marino, D. De Salvador et al. · Journal of Applied Physics · 2005 · 20 citations

Materials Science, Semiconductor Technology, Epitaxial Growth +13

Dry oxidation of MBE-SiGe films: rate enhancement, Ge redistribution and defect injection

M. Spadafora, A. Terrasi, S. Mirabella et al. · Materials Science in Semiconductor Processing · 2004 · 11 citations

Materials Engineering, Materials Science, Electrical Engineering +12

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