Concepedia

Hyeoksu Kang

HK

2

Publications

50

Citations

2

H-Index

2002

Active since

Affiliations

Sungkyunkwan University(Current)

Hyeoksu Kang is an author at Sungkyunkwan University specializing in semiconductors, electrical engineering, and engineering.

Top concepts

Thin FilmsEngineeringSemiconductorsApplied PhysicsSurface ScienceMaterial ScienceOxide SemiconductorsElectrical EngineeringOxide HeterostructuresMicroelectronics

Publications per year

2002–2002

2

Publications

2

Formation of Reliable HfO<sub>2</sub>/HfSi<sub><i>x</i></sub>O<sub><i>y</i></sub>Gate-Dielectric for Metal-Oxide-Semiconductor Devices

Yong Chun Quan, Jang Eun Lee, Hyeoksu Kang et al. · Japanese Journal of Applied Physics · 2002 · 25 citations

Semiconductors, Oxide Heterostructures, Electrical Engineering +15

Characteristics of HfO2/HfSixOy film as an alternative gate dielectric in metal–oxide–semiconductor devices

Hyeoksu Kang, Yonghan Roh, Geunhag Bae et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 25 citations

Engineering, Metal–oxide–semiconductor Devices, Effective Dielectric Constant +17

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